rus
The abbreviation TFE (Thin Film Equipment) is well known in the European high technology market. The company under that name is based in Italy’s largest engineering centre, Milan. Since 1998, TFE has supplied new and reconditioned equipment for the semiconductor and related industries. In 2001, the company was given the present name emphasising its key focus, thin-film technology solutions. Dr. Alberto Montobbio, VP of Sales and Marketing told us about the features of TFE equipment.
Mr. Montobbio, what are the core competencies of the TFE company?
Initially, we were focusing on the refurbishing of pre-owned UHV deposition equipment. TFE was founded by experts with the extensive experience in electronic engineering, and gradually we developed own items in our product line. The key focus is on solutions for the industrial production of semiconductor devices, however, because our equipment is very flexible, it can be effectively used in R&D. The ability to adapt to customer requirements is an important advantage of our company. We offer solutions that exactly match the customer specifications including the unique engineering design.
Our equipment can integrate almost any solution to create thin films, and we can use the best parts provided by the market leaders, whether an automation device or a vacuum component. The customer can choose features of equipment. It should also be noted that we are developing software for our machines. While the majority of our competitors use outsourcing, which slows down debugging and revision, we always provide the software with optimal reliability and functionality for the equipment.
In addition to the equipment, we also supply high-quality consumables from the United States and Europe, in particular, the targets for magnetron sputtering.
What are the technical features of the TFE equipment?
Our systems are very reliable and require minimal maintenance costs thus ensuring lower cost of ownership. An advantage of the systems for research institutions is the ability to work with substrates of different materials that have different sizes. At the same time, we offer a wide range of technologies to deal with new materials. Industrial solutions can be characterised by high performance. A key feature is the use of a load lock system that provides fast processing and higher quality due to the clean technological environment.
If we look at specific models, horizontal vacuum magnetron sputtering system BH3/4F and cluster vacuum deposition system Polygon are of special interest for the Russian market.
BH3/4F is a reliable and easy-to-maintain machine with fully automatic control. Spraying with three or four magnetrons is directed downward, and a high uniformity of film thickness on substrates up to 315 Ч 315 mm is ensured. Pre-etching and heating of substrates is provided in separate chamber. This system is ideal for the serial production of hybrid integrated circuits on ceramic substrates. Furthermore, it is possible to use reactive deposition with oxygen and nitrogen. As an additional feature I wish to mention the possibility to have extended (bigger) tools for higher productivity.
The Polygon cluster system allows you to integrate up to 10 different processes in isolated vacuum chambers. Polygon allows deposition of various materials including the magnetic films on up to 300 mm wafers. The system is controlled in an automated mode including remote access for software diagnostics and updates.
It is also worth mentioning the Eclipse tools that with more than 1000 tools installed worldwide are one of the most popular tools ever. TFE supply fully refurbished Eclipse tools that are a low cost solution for the most common deposition processes for medium to high volume production. A broad process library and various hardware solutions are available for the different customer needs.
Which market segments are the key ones for the company?
The new equipment is mainly bought by European industrial companies and research organisations. We hold strong positions in the markets of Italy, France, Great Britain, Austria and the Nordic countries. Moreover, in Europe there is a demand for the refurbished industrial equipment, and China is the main market for remanufactured research systems.
How reasonable is the purchase of refurbished equipment?
We do not just restore the vacuum deposition equipment but provide deeper modernisation. Outdated and worn-out components including electronic ones, some electrical equipment and individual process modules are replaced. In fact, it is only the frame that is left from the old unit. The equipment is supplied with the latest software, and it is almost as good as new models of the same class with very significant savings to the customer. The cost of the refurbished equipment can be by 1.5–2 times lower than the new one with comparable features. A warranty is issued for the remanufactured machines.
How do you assess the prospects for the Russian market?
The Russian market is very interesting for us, and we believe in its potential. It is very important that we are cooperating with a strong partner, Eurointech. One of the features of the semiconductor industry is a relatively long term of the projects. A few years ago it would require a lot of effort and patience to enter the Chinese market but the results achieved fully justify the input costs. I am confident that we will succeed in Russia.
Interview: Dmitry Gudilin
Mr. Montobbio, what are the core competencies of the TFE company?
Initially, we were focusing on the refurbishing of pre-owned UHV deposition equipment. TFE was founded by experts with the extensive experience in electronic engineering, and gradually we developed own items in our product line. The key focus is on solutions for the industrial production of semiconductor devices, however, because our equipment is very flexible, it can be effectively used in R&D. The ability to adapt to customer requirements is an important advantage of our company. We offer solutions that exactly match the customer specifications including the unique engineering design.
Our equipment can integrate almost any solution to create thin films, and we can use the best parts provided by the market leaders, whether an automation device or a vacuum component. The customer can choose features of equipment. It should also be noted that we are developing software for our machines. While the majority of our competitors use outsourcing, which slows down debugging and revision, we always provide the software with optimal reliability and functionality for the equipment.
In addition to the equipment, we also supply high-quality consumables from the United States and Europe, in particular, the targets for magnetron sputtering.
What are the technical features of the TFE equipment?
Our systems are very reliable and require minimal maintenance costs thus ensuring lower cost of ownership. An advantage of the systems for research institutions is the ability to work with substrates of different materials that have different sizes. At the same time, we offer a wide range of technologies to deal with new materials. Industrial solutions can be characterised by high performance. A key feature is the use of a load lock system that provides fast processing and higher quality due to the clean technological environment.
If we look at specific models, horizontal vacuum magnetron sputtering system BH3/4F and cluster vacuum deposition system Polygon are of special interest for the Russian market.
BH3/4F is a reliable and easy-to-maintain machine with fully automatic control. Spraying with three or four magnetrons is directed downward, and a high uniformity of film thickness on substrates up to 315 Ч 315 mm is ensured. Pre-etching and heating of substrates is provided in separate chamber. This system is ideal for the serial production of hybrid integrated circuits on ceramic substrates. Furthermore, it is possible to use reactive deposition with oxygen and nitrogen. As an additional feature I wish to mention the possibility to have extended (bigger) tools for higher productivity.
The Polygon cluster system allows you to integrate up to 10 different processes in isolated vacuum chambers. Polygon allows deposition of various materials including the magnetic films on up to 300 mm wafers. The system is controlled in an automated mode including remote access for software diagnostics and updates.
It is also worth mentioning the Eclipse tools that with more than 1000 tools installed worldwide are one of the most popular tools ever. TFE supply fully refurbished Eclipse tools that are a low cost solution for the most common deposition processes for medium to high volume production. A broad process library and various hardware solutions are available for the different customer needs.
Which market segments are the key ones for the company?
The new equipment is mainly bought by European industrial companies and research organisations. We hold strong positions in the markets of Italy, France, Great Britain, Austria and the Nordic countries. Moreover, in Europe there is a demand for the refurbished industrial equipment, and China is the main market for remanufactured research systems.
How reasonable is the purchase of refurbished equipment?
We do not just restore the vacuum deposition equipment but provide deeper modernisation. Outdated and worn-out components including electronic ones, some electrical equipment and individual process modules are replaced. In fact, it is only the frame that is left from the old unit. The equipment is supplied with the latest software, and it is almost as good as new models of the same class with very significant savings to the customer. The cost of the refurbished equipment can be by 1.5–2 times lower than the new one with comparable features. A warranty is issued for the remanufactured machines.
How do you assess the prospects for the Russian market?
The Russian market is very interesting for us, and we believe in its potential. It is very important that we are cooperating with a strong partner, Eurointech. One of the features of the semiconductor industry is a relatively long term of the projects. A few years ago it would require a lot of effort and patience to enter the Chinese market but the results achieved fully justify the input costs. I am confident that we will succeed in Russia.
Interview: Dmitry Gudilin
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