New solution for ion implantation developed by IBS
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The French company IBS (Ion Beam Services) is well known in Russia and around the world for its ion implantation systems for doping semiconductor wafers and epitaxial structures. Up to 85% of equipment manufactured by IBS is exported, including to Russia. IMC systems for small- and medium-scale production, as well as for R&D have proven themselves in Novosibirsk, Zelenograd, Moscow. Also, the company offers PULSION plasma immersion ion implantation systems, which are characterized by a combination of low ion energy and high dose, process stability and the possibility of precise control of the depth of doping. In 2017, IBS introduced a new development – the FLEXion platform. The first deputy general director, Dr. Gilles Mathieu, explains the features of this system.