Quick and accurate non-contact testing of thin films
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Control of electrical, geometric and optical characteristics of functional thin films on glass, foil and semiconductor wafers allows to optimize the processes of their deposition, to improve the quality of coatings and to reduce costs. One of the new areas is the use of high-frequency eddy current control. Instruments based on this measurement method are manufactured by SURAGUS from Dresden (Germany), which was founded to commercialize the development of the Fraunhofer Institute for Ceramic Technologies and Systems (Fraunhofer IKTS). In Russia, SURAGUS tools are represented by MINATEH. At SEMICON Europa 2017, the managing director of SURAGUS Marcus Klein answered the questions of our journal.