rus
Special Issue/2019
N. E. Ivanova, N. V. Zenchenko, N. V. Shchavruk, E. B. Evlampieva
Features of manufacturing microwave MICs using photolac at formation of ground plane above the crystal active surface
Features of manufacturing microwave MICs using photolac at formation of ground plane above the crystal active surface
The work is devoted to the solution of the problem of forming a ground plane in a microwave system based on GaN on sapphire substrates. A technological solution for the formation of the ground plane has been proposed using the domestic analogue of polyimide over the active part of the MIS. The results of tests of the manufactured instruments have been presented.
The work is devoted to the solution of the problem of forming a ground plane in a microwave system based on GaN on sapphire substrates. A technological solution for the formation of the ground plane has been proposed using the domestic analogue of polyimide over the active part of the MIS. The results of tests of the manufactured instruments have been presented.
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