Considering the process for the production of silicon nanostructures, it is important to take into account their transition to the state of dimensional quantization accompanied by a change in their mechanical and structural properties. These effects also need to be taken into account when developing a process control system for the production of devices and systems containing nanoscale structures. In this paper, we consider new requirements for the process control, including those for the equipment with use of which this control is carried out.


Разработка: студия Green Art