rus
Competent opinion
F.Torres-Miguel
Creating perfect solutions as basic principle of business SPTS is one of the world leaders in the field of etch and deposition process solutions for the global semiconductor and microelectronics industry. The equipment and solutions offered by SPTS Technologies, an Orbotech company, has been successfully used by leading semiconductor companies, fabs and research centers around the world for over 30 years. About a year ago we published an article about the developments of SPTS (NANOINDUSTRY No. 2 (72), 2017). This interview with Franck Torres-Miguel, Regional Account Manager (on the left in the photo), continues that story.
Creating perfect solutions as basic principle of business SPTS is one of the world leaders in the field of etch and deposition process solutions for the global semiconductor and microelectronics industry. The equipment and solutions offered by SPTS Technologies, an Orbotech company, has been successfully used by leading semiconductor companies, fabs and research centers around the world for over 30 years. About a year ago we published an article about the developments of SPTS (NANOINDUSTRY No. 2 (72), 2017). This interview with Franck Torres-Miguel, Regional Account Manager (on the left in the photo), continues that story.
G.Mathieu
New solution for ion implantation developed by IBS The French company IBS (Ion Beam Services) is well known in Russia and around the world for its ion implantation systems for doping semiconductor wafers and epitaxial structures. Up to 85% of equipment manufactured by IBS is exported, including to Russia. IMC systems for small- and medium-scale production, as well as for R&D have proven themselves in Novosibirsk, Zelenograd, Moscow. Also, the company offers PULSION plasma immersion ion implantation systems, which are characterized by a combination of low ion energy and high dose, process stability and the possibility of precise control of the depth of doping. In 2017, IBS introduced a new development – the FLEXion platform. The first deputy general director, Dr. Gilles Mathieu, explains the features of this system.
New solution for ion implantation developed by IBS The French company IBS (Ion Beam Services) is well known in Russia and around the world for its ion implantation systems for doping semiconductor wafers and epitaxial structures. Up to 85% of equipment manufactured by IBS is exported, including to Russia. IMC systems for small- and medium-scale production, as well as for R&D have proven themselves in Novosibirsk, Zelenograd, Moscow. Also, the company offers PULSION plasma immersion ion implantation systems, which are characterized by a combination of low ion energy and high dose, process stability and the possibility of precise control of the depth of doping. In 2017, IBS introduced a new development – the FLEXion platform. The first deputy general director, Dr. Gilles Mathieu, explains the features of this system.
A.Sheppard
Microspheric lens – new word in optical nanoscopy In the summer of 2017, in Manchester (Great Britain) a presentation of an optical microscope with a nanometer resolution (nanoscope) NANOPSIS M developed by LIG Nanowise – a start-up, which was founded by the staff of Manchester University, was held. In the autumn, the nanoscope was demonstrated at SEMICON Europa 2017, where the commercial director of the project, Alex Sheppard, kindly answered the questions of our magazine.
Microspheric lens – new word in optical nanoscopy In the summer of 2017, in Manchester (Great Britain) a presentation of an optical microscope with a nanometer resolution (nanoscope) NANOPSIS M developed by LIG Nanowise – a start-up, which was founded by the staff of Manchester University, was held. In the autumn, the nanoscope was demonstrated at SEMICON Europa 2017, where the commercial director of the project, Alex Sheppard, kindly answered the questions of our magazine.
M.Trinker
High-precision micro-assembly systems for photonics and optoelectronics ficonTEC (Germany) develops, manufactures and supplies solutions for micro-assembly, bonding and testing of photonics, optoelectronics and MEMS. The company's headquarter and production site of about 4,000 m2 are located in the city of Achim, near Bremen. Since 2001, more than 1,000 systems have been installed worldwide, which manufacture components for telecommunications, biomedicine, lighting engineering, automotive and other industries. CFO Matthias Trinker explains about the company.
High-precision micro-assembly systems for photonics and optoelectronics ficonTEC (Germany) develops, manufactures and supplies solutions for micro-assembly, bonding and testing of photonics, optoelectronics and MEMS. The company's headquarter and production site of about 4,000 m2 are located in the city of Achim, near Bremen. Since 2001, more than 1,000 systems have been installed worldwide, which manufacture components for telecommunications, biomedicine, lighting engineering, automotive and other industries. CFO Matthias Trinker explains about the company.
B.Bontschew
Custom-made vacuum deposition systems The VacuumTechExpo 2018 exhibition was visited for the first time by the specialists of the German company FHR, who worked at the ZENCO PLASMA's booth. FHR designed and manufactured vacuum deposition systems, which are used in the production of semiconductor devices, photovoltaics, sensors, optics, and also in other high-tech areas. In 2016, the company celebrated its 25th anniversary. Since 2008, 100% of its shares belong to the Centrotherm group. Currently, FHR employs about 150 people, and its headquarters is located in Ottendorf-Okrilla, in 10 km from Dresden. Although the equipment of the company can implement a variety of technologies for deposition and etching, the main projects and competences are related to magnetron sputtering systems, which are successfully used in scientific research, batch and mass production. Bontscho Bontschew, Senior Sales Manager of FHR, told us about the peculiarities of the company's solutions.
Custom-made vacuum deposition systems The VacuumTechExpo 2018 exhibition was visited for the first time by the specialists of the German company FHR, who worked at the ZENCO PLASMA's booth. FHR designed and manufactured vacuum deposition systems, which are used in the production of semiconductor devices, photovoltaics, sensors, optics, and also in other high-tech areas. In 2016, the company celebrated its 25th anniversary. Since 2008, 100% of its shares belong to the Centrotherm group. Currently, FHR employs about 150 people, and its headquarters is located in Ottendorf-Okrilla, in 10 km from Dresden. Although the equipment of the company can implement a variety of technologies for deposition and etching, the main projects and competences are related to magnetron sputtering systems, which are successfully used in scientific research, batch and mass production. Bontscho Bontschew, Senior Sales Manager of FHR, told us about the peculiarities of the company's solutions.
M.Klein
Quick and accurate non-contact testing of thin films Control of electrical, geometric and optical characteristics of functional thin films on glass, foil and semiconductor wafers allows to optimize the processes of their deposition, to improve the quality of coatings and to reduce costs. One of the new areas is the use of high-frequency eddy current control. Instruments based on this measurement method are manufactured by SURAGUS from Dresden (Germany), which was founded to commercialize the development of the Fraunhofer Institute for Ceramic Technologies and Systems (Fraunhofer IKTS). In Russia, SURAGUS tools are represented by MINATEH. At SEMICON Europa 2017, the managing director of SURAGUS Marcus Klein answered the questions of our journal.
Quick and accurate non-contact testing of thin films Control of electrical, geometric and optical characteristics of functional thin films on glass, foil and semiconductor wafers allows to optimize the processes of their deposition, to improve the quality of coatings and to reduce costs. One of the new areas is the use of high-frequency eddy current control. Instruments based on this measurement method are manufactured by SURAGUS from Dresden (Germany), which was founded to commercialize the development of the Fraunhofer Institute for Ceramic Technologies and Systems (Fraunhofer IKTS). In Russia, SURAGUS tools are represented by MINATEH. At SEMICON Europa 2017, the managing director of SURAGUS Marcus Klein answered the questions of our journal.
A.Kovalev
Advanced packaging, production of MEMS and integrated photonics... Zelenograd Nanotechnology Center (ZNTC) is one of the few companies that presented Russian high technologies at the SEMICON Europa 2017 in Munich (Germany). Anatoly Kovalev, General Director of ZNTC, answered the questions of our journal at the joint Moscow booth "Made in Moscow".
Advanced packaging, production of MEMS and integrated photonics... Zelenograd Nanotechnology Center (ZNTC) is one of the few companies that presented Russian high technologies at the SEMICON Europa 2017 in Munich (Germany). Anatoly Kovalev, General Director of ZNTC, answered the questions of our journal at the joint Moscow booth "Made in Moscow".
Nanotechnology
Wafer level packaging of MEMS
Wafer level packaging of MEMS prior to wafer dicing can provide protection from particles and dicing slurry, while significantly reducing form factor and the overall die cost.
L.Kolesnik, Myo Kyaw Hlaing, Zaw Phyo Aung
Increasing adhesion of current-conducting coatings on alumina substrates The paper presents the results of a study of the feasibility of using a titanium sublayer to increase the adhesion of current-carrying coatings to alumina substrates. Thin-film copper coating was deposited on a substrate of alumina ceramic by thermal evaporation, and the titanium adhesive layer was obtained by magnetron sputtering. It has been found that a titanium sublayer can be used as an adhesive layer for materials that are used for soldering of components.
Increasing adhesion of current-conducting coatings on alumina substrates The paper presents the results of a study of the feasibility of using a titanium sublayer to increase the adhesion of current-carrying coatings to alumina substrates. Thin-film copper coating was deposited on a substrate of alumina ceramic by thermal evaporation, and the titanium adhesive layer was obtained by magnetron sputtering. It has been found that a titanium sublayer can be used as an adhesive layer for materials that are used for soldering of components.
Tags: magnetron sputtering metal-ceramic compound power module thermal evaporation thin-film technology магнетронное распыление силовой модуль соединение металл-керамика термическое испарение тонкопленочные технологии
Test & Measurement
E.Gladkikh, K.Kravchuk, A.Useinov
Investigation of temperature dependent mechanical properties of polymers measured by dynamic mechanical analysis Dynamic mechanical analysis characterization of polymers at elevated and sub-ambient temperatures were performed using a nanohardness tester NanoScan, equipped with a heating and cooling management system consisting of a temperature control stage that used a Peltier thermal element. Analysis of polycarbonate and ultra-high molecular weight polyethylene (UHMWPE) properties showed that heating from room temperature up to 60 °C leads to decrease of hardness value by 15% and cooling to 2 °C causes increase in hardness value by the same value. Changing of polycarbonate elastic (storage) modulus in the temperature range under consideration was not over 10%; loss modulus was near to zero at all temperatures. This study evaluates the elastic (storage) and loss moduli of UHMWPE: both moduli increased by 2 times when the temperature changed from 2 to 60°C.
Investigation of temperature dependent mechanical properties of polymers measured by dynamic mechanical analysis Dynamic mechanical analysis characterization of polymers at elevated and sub-ambient temperatures were performed using a nanohardness tester NanoScan, equipped with a heating and cooling management system consisting of a temperature control stage that used a Peltier thermal element. Analysis of polycarbonate and ultra-high molecular weight polyethylene (UHMWPE) properties showed that heating from room temperature up to 60 °C leads to decrease of hardness value by 15% and cooling to 2 °C causes increase in hardness value by the same value. Changing of polycarbonate elastic (storage) modulus in the temperature range under consideration was not over 10%; loss modulus was near to zero at all temperatures. This study evaluates the elastic (storage) and loss moduli of UHMWPE: both moduli increased by 2 times when the temperature changed from 2 to 60°C.
Tags: hardness loss modulus modulus of elasticity polycarbonate temperature ultra-high molecular weight polyethylene (uhmwpe) модуль потерь модуль упругости поликарбонат сверхвысокомолекулярный полиэтилен (свмпэ) твердость температура
A.Akhmetova, G.Meshkov, O.Sinitsyna, I.Yaminsky
Methods of nanoscopy for directional modification of nanoscale 2D structures and determination of their physical-chemical and electrophysical characteristics Methods for local modification of the carbon surface using atomic force microscopy in air and scanning capillary microscopy in electrolyte solutions are considered. It is noted that the use of scanning probe microscopy makes it possible to determine the structure, physical-chemical and electrophysical characteristics of 2D structures with a spatial resolution up to units and fractions of a nanometer.
Methods of nanoscopy for directional modification of nanoscale 2D structures and determination of their physical-chemical and electrophysical characteristics Methods for local modification of the carbon surface using atomic force microscopy in air and scanning capillary microscopy in electrolyte solutions are considered. It is noted that the use of scanning probe microscopy makes it possible to determine the structure, physical-chemical and electrophysical characteristics of 2D structures with a spatial resolution up to units and fractions of a nanometer.
Tags: chemical reactions on surfaces energy-efficient technologies nanolithography scanning probe microscope нанолитография сканирующий зондовый микроскоп химические реакции на поверхности энергоэффективные технологии
Conferences, Exhibitions, Seminars
D.Georgiev
Российские высокие технологии на выставке Semicon Europa The SEMICON Europa 2017 exhibition, which was held in Munich, Germany, attracted a record number of visitors, which was greatly facilitated by its сo-location with the productronica. The Russian semiconductor industry was represented by a collective booth of Moscow companies, in addition, a special block of the business program was dedicated to our country.
Российские высокие технологии на выставке Semicon Europa The SEMICON Europa 2017 exhibition, which was held in Munich, Germany, attracted a record number of visitors, which was greatly facilitated by its сo-location with the productronica. The Russian semiconductor industry was represented by a collective booth of Moscow companies, in addition, a special block of the business program was dedicated to our country.
L.Ratkin
New fundamental and applied developments of Russian Academy of Sciences At the end of March, the general meeting of the members of the Russian Academy of Sciences (RAS) in Moscow summed up the results of the work of academic institutes in 2017 and presented new fundamental and applied scientific developments in various fields, in particular, in nanotechnology and nanomaterials.
New fundamental and applied developments of Russian Academy of Sciences At the end of March, the general meeting of the members of the Russian Academy of Sciences (RAS) in Moscow summed up the results of the work of academic institutes in 2017 and presented new fundamental and applied scientific developments in various fields, in particular, in nanotechnology and nanomaterials.
Education
A.Akhmetova, A.Fedoseev, I.Yaminsky, Yu.Belov
Nanotechnology youth innovation creativity centre at Faculty of Physics of Lomonosov Moscow State University How to quickly learn 3D microscopy and 3D nanotechnology? It is necessary to become a participant of the Nanotechnology youth innovation creativity centre and a listener of the courses "3D Design in SolidWorks and Machining" and "Scanning Probe Microscopy". Modern machining centers manufacture parts with nanometer accuracy, and scanning probe microscopes make it possible to measure the roughness of the processed surface with an accuracy of fractions of nanometers.
Nanotechnology youth innovation creativity centre at Faculty of Physics of Lomonosov Moscow State University How to quickly learn 3D microscopy and 3D nanotechnology? It is necessary to become a participant of the Nanotechnology youth innovation creativity centre and a listener of the courses "3D Design in SolidWorks and Machining" and "Scanning Probe Microscopy". Modern machining centers manufacture parts with nanometer accuracy, and scanning probe microscopes make it possible to measure the roughness of the processed surface with an accuracy of fractions of nanometers.
Стандартизация
V.Luchinin, I.Khmelnitsky
International regulatory and methodological framework for ensuring security in field of nanoindustry The analysis of the current state of regulatory and methodical support of the safety of processes and products of the nanoindustry abroad is presented. Some issues of standardization with reference to the nanoindustry of the USA, the European Union and China are considered. The results of development by international organizations (ISO, IEC, etc.) of standards in the field of nanotechnology safety are generalized. Particular attention is paid to the consideration of ISO standards.
International regulatory and methodological framework for ensuring security in field of nanoindustry The analysis of the current state of regulatory and methodical support of the safety of processes and products of the nanoindustry abroad is presented. Some issues of standardization with reference to the nanoindustry of the USA, the European Union and China are considered. The results of development by international organizations (ISO, IEC, etc.) of standards in the field of nanotechnology safety are generalized. Particular attention is paid to the consideration of ISO standards.
Tags: environmental protection international standard nanomaterial nanotechnology national standard standardization защита окружающей среды международный стандарт наноматериал нанотехнология национальный стандарт стандартизация
Nanomaterials
B.Taussarova, K.Samenova
Development of packaging materials for food industry based on silver nanoparticles The article considers the method of obtaining silver nanoparticles in aqueous solutions. The effect of reaction conditions such as the concentration of a reducing agent and silver, as well as the pH of the medium was studied, optimal conditions for synthesis were found. The parameters for processing with aqueous solutions of silver nanoparticles for making packaging materials with antimicrobial properties are determined.
Development of packaging materials for food industry based on silver nanoparticles The article considers the method of obtaining silver nanoparticles in aqueous solutions. The effect of reaction conditions such as the concentration of a reducing agent and silver, as well as the pH of the medium was studied, optimal conditions for synthesis were found. The parameters for processing with aqueous solutions of silver nanoparticles for making packaging materials with antimicrobial properties are determined.