New classics of photolithography
We offer manual desktop spin coaters and automatic systems for application of photoresist to the surface of a substrate. Desktop systems are designed for use in laboratories, as well as in small-scale production and allow to apply a variety of liquid compositions to up to 200 mm substrates, forming a layer from several units to 100 μm in thickness. Floor systems are designed for wafers with a diameter of up to 300 mm and above, can be equipped with an auto dispenser and a robot for loading and unloading the wafers.
The range of equipment for contact photolithography includes manual, semi-automatic and automatic mask aligners for alignment and exposure. Manual systems for wafers up to 150 mm in diameter are optimal for research, development and production of small batches, and automatic systems for up to 300 mm wafers are used for serial and mass production. The range of semi-automatic systems includes MDA-20000SA mask aligner, which allows to expose up to 500Ч500 mm substrates.
Projects in Russia are still mainly related to the supply of manual units. The most popular spin coater for the application of photoresist is SPIN-1200T for substrates from 5Ч5 mm to 100 mm in diameter. This model is compact, easy to maintain and controlled via a touch screen.
Among the mask aligners, MDA-400M-6 for 150 mm wafers, which provides the alignment accuracy of 1 μm, is in greatest demand in Russia.
What are the advantages of your solutions for photolithography?
Our equipment is at least as good as analogues of European and North American production in terms of quality, reliability, accuracy, serviceability and other parameters, but at the same time it is much cheaper. A number of our technical solutions are protected by patents. In addition to combining high performance with affordable equipment prices, customers are attracted by a very high quality of service support. As a result, over 20 years we sold more than 500 mask aligners and about 400 spin coaters that are successfully used worldwide. Our full automatic systems are installed at large factories in Europe, India and East Asia, which indicates the confidence of the leading enterprises in the semiconductor industry.
How do you assess the prospects for the development of photolithography systems?
On the one hand, photolithography is a classical technology that integrates seamlessly into any production of electronic components. On the other hand, our systems are successfully used in the production of the most promising types of semiconductor and photonics devices, including 3D-integrated components, microwave devices, MEMS, displays, LEDs, including OLED, optical components, etc. This enables us to look with confidence and optimism to the future.
Interview: Dmitry Gudilin