Automated defect detection system in MEMS manufacturing
Теги: detecting defects lithographic defects mems photoresist мемс определение дефектов фоторезист
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Well-established systems of control and inspection of products at various technological stages play a key role in ensuring production flexibility, in continuous improvement of production processes and reduction of production losses. In MEMS production, an automated optical inspection is often used for these purposes, the result of which is a large number of images that require processing and analysis. This article presents the results of the implementation of the automated system for detecting defects of lithography, based on software for image processing, developed specifically for this purpose by AKSALIT Soft, at MAPPER.