https://doi.org/10.22184/1993-8578.2023.16.5.272.280

The work is devoted to developing the optical coatings technology for injection lasers cavities on an ion-beam deposition facility. The optical coatings design has been performed to meet the requirements for facets reflection coefficients, and dielectric layers deposition modes have been determined. Development of the deposition modes consisted of determining the optimal parameters of an ion beam, the flow ratio rates of the ion-source and reagent gases, and substrate temperature. Calculations of the spectral characteristics of high-reflection and anti-reflection coatings obtained based on the proposed designs and experimental values of dielectric layers' refractive indices indicate that required reflection coefficients for injection lasers cavities have been achieved.