VACUUM TWO-AXIS MOVEMENT MECHANISM WITH ELECTRORHEOLOGICAL SPEED CONTROL
In many areas of modern nanotechnologies carried out in a vacuum it is required to move objects with high precision. The paper considers a two-axis vacuum pneumohydraulic drive capable of performing precise movements. High precision of the mechanism is achieved due to use of intelligent material as a working fluid of the hydraulic part – an electrorheological fluid that can instantly change its rheological properties under the action of an external electric field. It has been experimentally established in the work that the most effective adjustment of the speed of the drive rod movement is carried out at low pressures in the pneumatic cylinder with a 25%concentration of the dispersed phase of the working fluid.
Tags: electrorheological fluid pneumohydraulic drive speed adjustment vacuum viscosity вакуум вязкость пневмогидравлический привод регулировка скорости перемещения электрореологическая жидкость
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