STUDY OF THERMOEMISSION SPUTTERING METHOD FOR PREPARING THIN-FILM METAL COATINGS FOR OPEN SPACE SCANNING TUNNEL MICROSCOPE OPERATION
Thin-film coatings prepared by thermal emission sputtering by the number of metals and alloys in a vacuum chamber close to the space vacuum conditions for the first in the world space scanning tunnel microscope made in Russia, and designed as an Earth satellite with autonomous power supply and launched in summer 2023 for the purpose of gathering statistics on the size and density of micro- and nano-particles of dust and meteorites in Earth orbits. Due to the lack of previous scientific interest in sputtering in low vacuum because of the poor purity of the coatings obtained, data on coatings were obtained that are unique and in demand in practice due to the need for objects surface conductivity of observed in the scanning tunnel microscope. Conclusions about applicability of some metals and alloys to sputtering at scanning tunnel microscope operation in space are presented.
Tags: scanning tunnel microscopy surface morphology thermal emission sputtering морфология поверхности сканирующая туннельная микроскопия термоэмиссионное напыление
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