A methodology for development of thin-film systems is presented, which will make it possible to obtain chemoresistive sensors with a given gas sensitivity. The methodology provides for conducting a series of experiments on the thin-film systems synthesis using various synthesis technologies (different starting materials, parameters of thin films synthesis, various methods of thin films synthesis: thermoresistive evaporation, air-drop sputtering, annealing in oxygen atmosphere), measuring their properties and characteristics, creating a database of experimental results; generalization of the dependencies contained in the experimental data using artificial neural networks in the form of multifactorial computational models. These models will make it possible to solve direct and inverse problems, extrapolate the dependencies revealed in the experimental data, and conduct virtual experiments.


Разработка: студия Green Art