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DOI: https://doi.org/10.22184/1993-8578.2023.16.5.266.270
A two-stage nanopositioning system has been developed along three coordinates X, Y and Z with an accuracy of 0.1 nm. The nanopositioning system is intended for use in scanning probe microscopy, ultra-high resolution optical microscopy, and microlens microscopy. This paper considers an example of constructing a scanning capillary microscope based on the developed system of precision movements.
Tags: nanocapillary nanodisplacements probe microscopy scanning capillary microscopy зондовая микроскопия нанокапилляр наноперемещения сканирующая капиллярная микроскопия
Subscribe to the journal Nanoindustry to read the full article.
A two-stage nanopositioning system has been developed along three coordinates X, Y and Z with an accuracy of 0.1 nm. The nanopositioning system is intended for use in scanning probe microscopy, ultra-high resolution optical microscopy, and microlens microscopy. This paper considers an example of constructing a scanning capillary microscope based on the developed system of precision movements.
Tags: nanocapillary nanodisplacements probe microscopy scanning capillary microscopy зондовая микроскопия нанокапилляр наноперемещения сканирующая капиллярная микроскопия
Subscribe to the journal Nanoindustry to read the full article.
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