Improving accuracy and reliability of measurements at the nanoscale is becoming increasingly important for various applications, especially in areas such as semiconductor electronics, optical metamaterials, sensors, and biological measurements. With the development of high-resolution imaging techniques, the need for metrological verification of these devices has also naturally arisen. The challenge of measuring nanoscale morphology at a specific location has emerged, which requires positional accuracy in both vertical and lateral directions. Stability and robustness of measurements require that the microscope should be regularly calibrated using calibration tools. Quartz calibration measures can be one such standard.