DOI: https://doi.org/10.22184/1993-8578.2025.18.7-8.420.431

In this paper shows the possibility of creating sensitive elements based on integrated optical technology and MEMS structures. A prototype of a pressure sensor operating on the principle of optical interference is presented. The sensor’s sensing element is based on a Mach-Zehnder interferometer, one of the arms of which is located on a deformable membrane. The optical scheme of the interferometer is implemented on Si3N4 integrated waveguides. In the course of the study, a theoretical assessment of the effect of membrane deformation on waveguide geometry was performed. The calculations performed were tested during experimental studies of models of a micro-opto-mechanical pressure sensor with different configurations of the interferometer arms. As a result of the research, a technological basis for integrated optical sensors based on silicon nitride waveguides and MEMS technology for the formation of membranes on silicon substrates has been developed.