DOI: https://doi.org/10.22184/1993-8578.2025.18.7-8.432.439

In this work, the dependence of the optical characteristics of planar Si3N4 ring microresonators on their geometric properties is investigated. The dependence of the intrinsic and loaded quality factors of the ring resonator on the distance between the ring and the resonator waveguide is shown. Changing this distance allows tuning coupling coefficient of the resonator. As a result, the optimal geometric properties of the resonator that provide the highest quality factor have been determined. The results of this work can be used for the further development of photonic integrated circuits made of silicon nitride and devices based on them.