Development of nanotechnologies stimulates interest to thin films deposition, which are widely used in microelectronics, nanophotonics, optics and optoelectronics, spaceindustries for creation of strengthening, light-reflecting, dielectric and conducting coatings. Magnetron sputtering deposition of thin-films in vacuum is the most popular technology in this field today. Its main advantages are the high process speed and accuracy of sputtering material composition reproduction .


Разработка: студия Green Art