rus
From 14 to 16 April in Moscow at Sokolniki exhibition and convention centre the X International exhibition of vacuum machines, equipment and technologies VacuumTechExpo 2015 took place. Business program of the exhibition included a poster presentations of equipment from leading world and domestic manufacturers and international scientific and technical conference "Vacuum equipment, materials and technology". Once again held a competition "The best innovative product in the field of high technologies".
Innovative product is the result of innovative activity that had the practical implementation in the form of a new product, service, method of production (technology) or other significant result. The winners of the competition are 10 innovative products that reflect modern trends in the global and domestic vacuum equipment and technology.
TwisTorr FS 84
turbomolecular pump
Agilent Technologies and its official distributor Millab introduced a new TwisTorr turbomolecular pump 84 FS with pumping speed of 80 l/s. This model combines patented TwisTorr drag stage technology and Floating Suspension (FS) floating bearing system. The mass and length of the rotor are reduced while maintaining a high performance of the pump. Innovative TwisTorr technology provides high compression ratio for light gases and minimal system footprint. As a result, the power consumption and operating temperature are minimized.
FS system allows to reduce noise and vibration, and ensures optimum performance and high service life of the bearings. The unique bearing and dry lubrication in the TwisTorr 84 FS eliminate oil and maintenance, and permit operation of the pump in any orientation.
GHS VSD+ screw vacuum pump
GHS VSD+ is Atlas Copco’s new generation of oil-sealed rotary screw vacuum pumps with variable speed drive (VSD). Due to its plug & play design the GHS VSD+ Series are characterized by greater performance than a conventional rotary vane vacuum pumps. Innovative screw technology, the VSD and improved engine design offer increased efficiency. The noise level is approximately twice below that of comparable technologies. Ultra-high oil retention at all operating pressures from ultimate pressure to atmospheric pressure minimizes environmental impact.
The jury noted the following innovative features:
•modulation of the input stream;
•speed control of a drive in the pressure range from atmospheric to 400 mbar (abs.) to reduce energy consumption;
•modulating vacuum control in conjunction with the VSD drive;
•an effective oil retention;
•specialized versions for different applications.
Phoenix L300i leak detector
Portable multipurpose helium leak detector from a new range of products of Oerlikon Leybold Vacuum (OLV) is suitable for maintenance of vacuum systems and testing of individual objects. Advanced wireless technologies allows to remotely control the process of leak detection. Phoenix L300i allows to detect local and integral leak rates and is equally well suited to both service testing and series production.
A unique feature of the leak detector is a essentially new control panel with touch screen, which has intuitive interface. It is possible to use the integrated data storage to generate test reports. Leak detectors can be controlled remotely from iPad using apps developed by OLV. The software supports all versions of Phoenix L300i/L500i range. Thanks to Wi-Fi technology, remote control can be used at a distance of 50 meters from the equipment.
VAT Series 59 DN16CF
high vacuum leak valve
VAT Series 59 DN16CF is high vacuum leak valve, made by Swiss manufacturer VAT Vakuumventile. The valve is completely made of stainless steel and is designed to control a small gas flows. Metal construction allows case heating up to 300°C, and also provides corrosion protection and resistance to corrosive gases. The valve mechanism is based on a spring-loaded metal membrane that enables the use of the leak valve in the pressure range from 1∙10-10 mbar to 10 bar (abs.). Adjusting the clamping force is carried out by a precise stepper motor controlled by an integrated controller, which can connect to the PC via RS-232. Also a special version of the leak valve with manual drive is developed. Controller with feedback has a port for connecting a vacuum converter.
The innovative feature of leak valve is patented drive force transmission to the spring-loaded membrane in such a way that its sealing occurs only at the elastic deformation. Precision stepper motor via a helical gear accurately transmit the force to the spring, which deforms the membrane, changing the flow area diameter of the leak valve. A stepper motor is controlled by an integrated controller with feedback from a pressure transducer. This design provides smooth adjustment and high reproducibility of small of gas flows to maintain a constant pressure in the system, as well as independence from ambient temperature.
Vacuum system simulating
space conditions
Tomsk Polytechnic University has developed a set of equipment on the basis of automated vacuum facility for testing protective thin film coatings and materials on impact of the whole spectrum of the main damaging factors in space: vacuum, thermal effects, electron and proton radiation and electromagnetic radiation from the sun. The equipment consists of three parts – a compartment for samples, a compartment for space impact on test samples, and an optical measurements compartment.
The compartment for space impact includes a sun exposure system, a proton irradiation system, an electron beam irradiation system and a temperature control system. Electron beam irradiation system is equipped with two sources, generating particles with energies of 50 keV and 100 keV, the proton irradiation system – with a source of particles with energies up to 50 keV. The density of electron and proton streams are 1012–1016 m-2s-1, the unevenness does not exceed 10%.
The sun exposure system ISO-SKM-1 allows the irradiation of samples in the wavelength range from 200 to 2500 nm. The emission spectrum corresponds to an exo-atmospheric solar irradiance with an error less than 5%. Light spot is a square with a size of 120 × 120 mm. Unevenness of the flux does not exceed 10%.
A system installed in the optical measurement compartment enables calculating spectral reflection and solar radiation absorption coefficient of test material in vacuum in the range of radiation from 250 to 2800 nm.
The innovative feature of this system is the possibility to test in a single cycle space endurance of construction materials.
STE75 compact molecular-beam epitaxy system
Universal compact three-chamber SemiTEq STE75 system is designed for growth of А3В5, wide band А2В6 and А3N (in special version) compounds. The system is created with the latest advances in the field of molecular beam epitaxy of semiconductors and is intended for a wide range of modern research and development applications.
STE75 is the most compact system of molecular beam epitaxy in the market. It is specially configured to ensure maximum resources saving and high quality of the grown structures, which is important for scientific research and development.
TM Izophas 03 multi-functional vacuum system
Developed by the Research Institute of Precision Machine Manufacturing (NIITM), this compact facility is intended for atomic layer deposition of thin films on substrates with a diameter up to 100 mm. The equipment includes the following devices:
•reactor chamber made of aluminum;
•high-vacuum pumping system based on turbomolecular pump, forepump and throttle to maintain a predetermined pressure in the working chamber;
•plasma source with special device to match RF generator to the load for supplying radicals to the reaction chamber;
•heated electrode – substrate holder with special device to match RF generator to the load for temperature and substrate bias control;
•gaseous system for alternate supply of precursors into the working chamber;
•microprocessor control system, which can operate in automatic and manual modes.
The equipment implements plasma-enhanced atomic layer deposition (PALD) of thin films with good repeatability and providing their exceptional conformality, high uniformity and density, as well as the minimum number of defects. The system is equipped with devices of RF pretreatment and surface activation of the substrate before the PALD. The possibility of heating up to 500°C allows thermal atomic layer deposition.
Nika 2013 MN magnetron deposition system
Nika 2013 MN is developed by Laboratory of Vacuum Technology on the basis of Nika 2013 universal base station. It is designed for magnetron sputtering of films of different composition (metals, dielectrics, semiconductors) on wafers up to 150 mm. The system is equipped with a linear magnetrons of original design (up to 4 units) and ion beam gas-discharge source for cleaning with cold cathode II 400 and narrow beam spread.
Into the revolving drum of the working chamber, made of stainless steel, can simultaneously be loaded up to 48 plates of 100 mm diameter or over 100 plates of 60 × 48 mm size. Automated control system allows the deposition of any combination of material layers from four targets at single cycle with ion beam cleaning and heating. Deposition of resistive layers with film resistance control by a marker is possible. The magnetron, working in pairs of the target, allows depositing copper layers at rate up to 2 µm/min with a power supply of 5 kW.
Nika 2013 MN is the first Russian fully automatic system for the controlled deposition of multilayer coatings from four selected targets with the ion beam cleaning and worked in pairs of the target magnetron, which ensures a high speed deposition of copper and low energy consumption.
Vacuum tabletop system for magnetron sputtering of metallic and dielectric coatings on solid and dispersed samples
Vacuum tabletop system VSE-PVD-DESK-PRO designed by Vacuum System and Electronics implements magnetron sputtering of metal and dielectric coatings on solid and dispersed samples. The device is designed for fine-tuning specific technologies before transferring them to high-performance equipment, test samples and prototypes production, small batch production, researches in materials science, instrumentation, electronics, optical coatings, MEMS, etc., as well for the learning process.
A unique development is the vacuum vibra-cuvet for fast mixing of powders during sputtering. Vibra-cuvet is installed on substrate holder so that the rotary drive can put it under the selected process source: under ion source to clean the surface of powder particles, under the first magnetron for applying a sublayer, under the second magnetron for deposition of the main material. This allows to create and to study nanomaterials with internal layered structure, which consist of several layers of nanoscale films of different chemical composition and are characterized by a large specific surface with a multiphase anisotropic boundaries between the layers.
Compact rotation system with differential pumping is driven by a stepper motor and is equipped with optical encoders of the substrate position. This drive allows to rotate not only substrate holder in vacuum with speed required to ensure uniformity, but also to position the substrate relative to the magnetron or ion source with an error of less than 1 mm.
Magnetron sputtering device has a compact design with the ability to supply gas directly to the target area.
NITTIN vacuum elevator furnace for quenching in oil
The range of new vacuum elevator furnaces designed by NITTIN includes four devices. The electric furnaces consists of a vertical vacuum chamber and the working platform placed on three sides of it. Under the platform are located the vacuum system and water cooling system, power and management box, as well as step-down transformer.
The vacuum chamber is water-cooled double-walled housing made of sheet steel. Lined with corundum heating module is mounted in the upper area of the vacuum chamber. In the middle (loading) area is located the charging door. In the lower area (hardening tank) occurs cooling of the charge in the oil. Vacuum system is designed for pumping the working chamber of furnaces up to a residual pressure of 0.133 Pa and consists of a forepump and booster pump.
In the new vacuum electric furnaces the hardening, removal of residues of the oil and vacuum tempering are performed in one cycle. Thus, after heat treatment does not need to remove the allowances, and now processing in vacuum electric furnaces is finishing. So there is no need in the washing equipment, disposal cleaning solution, as well as in additional electric furnace for tempering. Electric furnaces are environmentally friendly equipment, in which there is no emission of reactive gases. This ensures their explosion and fire safety in the operation.
***
In the socio-economic priorities of Russia a special attention is paid to the development of knowledge-intensive industries with high added value. Such industries include vacuum technology, cryogenics and nanotechnology. There is no doubt that the VacuumTechExpo will contribute to the innovative development of Russian industry.
TwisTorr FS 84
turbomolecular pump
Agilent Technologies and its official distributor Millab introduced a new TwisTorr turbomolecular pump 84 FS with pumping speed of 80 l/s. This model combines patented TwisTorr drag stage technology and Floating Suspension (FS) floating bearing system. The mass and length of the rotor are reduced while maintaining a high performance of the pump. Innovative TwisTorr technology provides high compression ratio for light gases and minimal system footprint. As a result, the power consumption and operating temperature are minimized.
FS system allows to reduce noise and vibration, and ensures optimum performance and high service life of the bearings. The unique bearing and dry lubrication in the TwisTorr 84 FS eliminate oil and maintenance, and permit operation of the pump in any orientation.
GHS VSD+ screw vacuum pump
GHS VSD+ is Atlas Copco’s new generation of oil-sealed rotary screw vacuum pumps with variable speed drive (VSD). Due to its plug & play design the GHS VSD+ Series are characterized by greater performance than a conventional rotary vane vacuum pumps. Innovative screw technology, the VSD and improved engine design offer increased efficiency. The noise level is approximately twice below that of comparable technologies. Ultra-high oil retention at all operating pressures from ultimate pressure to atmospheric pressure minimizes environmental impact.
The jury noted the following innovative features:
•modulation of the input stream;
•speed control of a drive in the pressure range from atmospheric to 400 mbar (abs.) to reduce energy consumption;
•modulating vacuum control in conjunction with the VSD drive;
•an effective oil retention;
•specialized versions for different applications.
Phoenix L300i leak detector
Portable multipurpose helium leak detector from a new range of products of Oerlikon Leybold Vacuum (OLV) is suitable for maintenance of vacuum systems and testing of individual objects. Advanced wireless technologies allows to remotely control the process of leak detection. Phoenix L300i allows to detect local and integral leak rates and is equally well suited to both service testing and series production.
A unique feature of the leak detector is a essentially new control panel with touch screen, which has intuitive interface. It is possible to use the integrated data storage to generate test reports. Leak detectors can be controlled remotely from iPad using apps developed by OLV. The software supports all versions of Phoenix L300i/L500i range. Thanks to Wi-Fi technology, remote control can be used at a distance of 50 meters from the equipment.
VAT Series 59 DN16CF
high vacuum leak valve
VAT Series 59 DN16CF is high vacuum leak valve, made by Swiss manufacturer VAT Vakuumventile. The valve is completely made of stainless steel and is designed to control a small gas flows. Metal construction allows case heating up to 300°C, and also provides corrosion protection and resistance to corrosive gases. The valve mechanism is based on a spring-loaded metal membrane that enables the use of the leak valve in the pressure range from 1∙10-10 mbar to 10 bar (abs.). Adjusting the clamping force is carried out by a precise stepper motor controlled by an integrated controller, which can connect to the PC via RS-232. Also a special version of the leak valve with manual drive is developed. Controller with feedback has a port for connecting a vacuum converter.
The innovative feature of leak valve is patented drive force transmission to the spring-loaded membrane in such a way that its sealing occurs only at the elastic deformation. Precision stepper motor via a helical gear accurately transmit the force to the spring, which deforms the membrane, changing the flow area diameter of the leak valve. A stepper motor is controlled by an integrated controller with feedback from a pressure transducer. This design provides smooth adjustment and high reproducibility of small of gas flows to maintain a constant pressure in the system, as well as independence from ambient temperature.
Vacuum system simulating
space conditions
Tomsk Polytechnic University has developed a set of equipment on the basis of automated vacuum facility for testing protective thin film coatings and materials on impact of the whole spectrum of the main damaging factors in space: vacuum, thermal effects, electron and proton radiation and electromagnetic radiation from the sun. The equipment consists of three parts – a compartment for samples, a compartment for space impact on test samples, and an optical measurements compartment.
The compartment for space impact includes a sun exposure system, a proton irradiation system, an electron beam irradiation system and a temperature control system. Electron beam irradiation system is equipped with two sources, generating particles with energies of 50 keV and 100 keV, the proton irradiation system – with a source of particles with energies up to 50 keV. The density of electron and proton streams are 1012–1016 m-2s-1, the unevenness does not exceed 10%.
The sun exposure system ISO-SKM-1 allows the irradiation of samples in the wavelength range from 200 to 2500 nm. The emission spectrum corresponds to an exo-atmospheric solar irradiance with an error less than 5%. Light spot is a square with a size of 120 × 120 mm. Unevenness of the flux does not exceed 10%.
A system installed in the optical measurement compartment enables calculating spectral reflection and solar radiation absorption coefficient of test material in vacuum in the range of radiation from 250 to 2800 nm.
The innovative feature of this system is the possibility to test in a single cycle space endurance of construction materials.
STE75 compact molecular-beam epitaxy system
Universal compact three-chamber SemiTEq STE75 system is designed for growth of А3В5, wide band А2В6 and А3N (in special version) compounds. The system is created with the latest advances in the field of molecular beam epitaxy of semiconductors and is intended for a wide range of modern research and development applications.
STE75 is the most compact system of molecular beam epitaxy in the market. It is specially configured to ensure maximum resources saving and high quality of the grown structures, which is important for scientific research and development.
TM Izophas 03 multi-functional vacuum system
Developed by the Research Institute of Precision Machine Manufacturing (NIITM), this compact facility is intended for atomic layer deposition of thin films on substrates with a diameter up to 100 mm. The equipment includes the following devices:
•reactor chamber made of aluminum;
•high-vacuum pumping system based on turbomolecular pump, forepump and throttle to maintain a predetermined pressure in the working chamber;
•plasma source with special device to match RF generator to the load for supplying radicals to the reaction chamber;
•heated electrode – substrate holder with special device to match RF generator to the load for temperature and substrate bias control;
•gaseous system for alternate supply of precursors into the working chamber;
•microprocessor control system, which can operate in automatic and manual modes.
The equipment implements plasma-enhanced atomic layer deposition (PALD) of thin films with good repeatability and providing their exceptional conformality, high uniformity and density, as well as the minimum number of defects. The system is equipped with devices of RF pretreatment and surface activation of the substrate before the PALD. The possibility of heating up to 500°C allows thermal atomic layer deposition.
Nika 2013 MN magnetron deposition system
Nika 2013 MN is developed by Laboratory of Vacuum Technology on the basis of Nika 2013 universal base station. It is designed for magnetron sputtering of films of different composition (metals, dielectrics, semiconductors) on wafers up to 150 mm. The system is equipped with a linear magnetrons of original design (up to 4 units) and ion beam gas-discharge source for cleaning with cold cathode II 400 and narrow beam spread.
Into the revolving drum of the working chamber, made of stainless steel, can simultaneously be loaded up to 48 plates of 100 mm diameter or over 100 plates of 60 × 48 mm size. Automated control system allows the deposition of any combination of material layers from four targets at single cycle with ion beam cleaning and heating. Deposition of resistive layers with film resistance control by a marker is possible. The magnetron, working in pairs of the target, allows depositing copper layers at rate up to 2 µm/min with a power supply of 5 kW.
Nika 2013 MN is the first Russian fully automatic system for the controlled deposition of multilayer coatings from four selected targets with the ion beam cleaning and worked in pairs of the target magnetron, which ensures a high speed deposition of copper and low energy consumption.
Vacuum tabletop system for magnetron sputtering of metallic and dielectric coatings on solid and dispersed samples
Vacuum tabletop system VSE-PVD-DESK-PRO designed by Vacuum System and Electronics implements magnetron sputtering of metal and dielectric coatings on solid and dispersed samples. The device is designed for fine-tuning specific technologies before transferring them to high-performance equipment, test samples and prototypes production, small batch production, researches in materials science, instrumentation, electronics, optical coatings, MEMS, etc., as well for the learning process.
A unique development is the vacuum vibra-cuvet for fast mixing of powders during sputtering. Vibra-cuvet is installed on substrate holder so that the rotary drive can put it under the selected process source: under ion source to clean the surface of powder particles, under the first magnetron for applying a sublayer, under the second magnetron for deposition of the main material. This allows to create and to study nanomaterials with internal layered structure, which consist of several layers of nanoscale films of different chemical composition and are characterized by a large specific surface with a multiphase anisotropic boundaries between the layers.
Compact rotation system with differential pumping is driven by a stepper motor and is equipped with optical encoders of the substrate position. This drive allows to rotate not only substrate holder in vacuum with speed required to ensure uniformity, but also to position the substrate relative to the magnetron or ion source with an error of less than 1 mm.
Magnetron sputtering device has a compact design with the ability to supply gas directly to the target area.
NITTIN vacuum elevator furnace for quenching in oil
The range of new vacuum elevator furnaces designed by NITTIN includes four devices. The electric furnaces consists of a vertical vacuum chamber and the working platform placed on three sides of it. Under the platform are located the vacuum system and water cooling system, power and management box, as well as step-down transformer.
The vacuum chamber is water-cooled double-walled housing made of sheet steel. Lined with corundum heating module is mounted in the upper area of the vacuum chamber. In the middle (loading) area is located the charging door. In the lower area (hardening tank) occurs cooling of the charge in the oil. Vacuum system is designed for pumping the working chamber of furnaces up to a residual pressure of 0.133 Pa and consists of a forepump and booster pump.
In the new vacuum electric furnaces the hardening, removal of residues of the oil and vacuum tempering are performed in one cycle. Thus, after heat treatment does not need to remove the allowances, and now processing in vacuum electric furnaces is finishing. So there is no need in the washing equipment, disposal cleaning solution, as well as in additional electric furnace for tempering. Electric furnaces are environmentally friendly equipment, in which there is no emission of reactive gases. This ensures their explosion and fire safety in the operation.
***
In the socio-economic priorities of Russia a special attention is paid to the development of knowledge-intensive industries with high added value. Such industries include vacuum technology, cryogenics and nanotechnology. There is no doubt that the VacuumTechExpo will contribute to the innovative development of Russian industry.
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