Obtaining new materials and structures for semiconductor devices, MEMS, photovoltaics, photonics, etc. requires the use of special process and processing modes. In this regard, the RTP (rapid thermal processing) and direct injection (DLI) for vaporization of liquid precursors for CVD and ALD are of great interest. Solutions for implementation of RTP and DLI-CVD / DLI-ALD are developed and manufactured by the Annealsys company from Montpellier (France).


Разработка: студия Green Art