rus
Special Issue/2019
K. A. Medvedev, A. V. Kuzovkov, V. V. Ivanov
Algorithm and methodology for increasing the OPC-recipe effi ciency
Algorithm and methodology for increasing the OPC-recipe effi ciency
The paper describes the OPC-recipe calibration algorithm based on the differential evolution method. A technique for improving the quality of the recipe using the proposed algorithm has been developed and an experimental study has been carried out to evaluate its effectiveness.
The paper describes the OPC-recipe calibration algorithm based on the differential evolution method. A technique for improving the quality of the recipe using the proposed algorithm has been developed and an experimental study has been carried out to evaluate its effectiveness.
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