rus
Special Issue/2019
A. A. Kovalev, O. Yu. Yakovlev, V. I. Zuev, A. S. Kovalev, Ya. V. Belyaev, S. P. Timoshenkov
Design and technological features of manufacturing micromechanical systems of inertial MEMS sensors
Design and technological features of manufacturing micromechanical systems of inertial MEMS sensors
The article presents design and technological features of manufacturing inertial MEMS sensors based on the technological platform for direct connection of silicon wafers with SOI structures.
The article presents design and technological features of manufacturing inertial MEMS sensors based on the technological platform for direct connection of silicon wafers with SOI structures.
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