DOI: 10.22184/1993-8578.2020.

In the technological process of manufacturing microelectronic device structures (MDS), especially in production with submicron minimum dimensions, the relationship between the parameters of device structures and the technology for their manufacture is strengthened. Physical and technological modeling allows predicting the characteristics of MDS structures and establishing correlations of technological and electrical parameters of elements, the possibility of their optimal design.


Разработка: студия Green Art