DOI: https://doi.org/10.22184/1993-8578.2025.18.6.326.334

The applicability of the digital image correlation (DIC) method to atomic force microscopy (AFM) topographies under local loading is demonstrated. Technically pure Grade 4 titanium after equal-channel angular pressing according to the Conform scheme was investigated. Local deformation was formed by a microspherical diamond indenter (R = 2.5 μm). AFM scanning of the pre-/post-indentation region was performed with registration using a square scratch pattern (~1 µm). Pre-processing included artifact suppression and field equalization. Subpixel DIC over local windows provided recovery of the radial and tangential components of the displacement field. Continuous maps were obtained, capturing the propagation of disturbances beyond the contact zone and the features of local plastic deformation. The results confirm the technical feasibility and informativeness of DIC for quantitative mapping of displacements during nanoindentation of ultrafine-grained titanium.