rus
DOI: https://doi.org/10.22184/1993-8578.2025.18.7-8.402.408
The evolution of atomic force microscopy from an imaging method to a quantitative measurement tool highlights the problem of precise calibration. Traditional static standards do not provide the necessary versatility and accuracy at the subnanometer level. This paper presents a new approach to probe microscopy metrology based on the use of a dynamic measurement standard. This approach involves the use of a additional fourth piezomanipulator in addition to the three existing, strictly calibrated piezomanipulator, which moves the sample a precisely defined distance, creating a reference relief directly during scanning. This enables calibration of the scanning system along the X, Y, and Z axes without the need for special test structures, directly on the sample under study. The FemtoScan microscope’s vertical resolution, controlled down to 0.2 Å, is experimentally demonstrated, opening up new possibilities for precise nanoscale measurements.
Subscribe to the journal Nanoindustry to read the full article.
The evolution of atomic force microscopy from an imaging method to a quantitative measurement tool highlights the problem of precise calibration. Traditional static standards do not provide the necessary versatility and accuracy at the subnanometer level. This paper presents a new approach to probe microscopy metrology based on the use of a dynamic measurement standard. This approach involves the use of a additional fourth piezomanipulator in addition to the three existing, strictly calibrated piezomanipulator, which moves the sample a precisely defined distance, creating a reference relief directly during scanning. This enables calibration of the scanning system along the X, Y, and Z axes without the need for special test structures, directly on the sample under study. The FemtoScan microscope’s vertical resolution, controlled down to 0.2 Å, is experimentally demonstrated, opening up new possibilities for precise nanoscale measurements.
Subscribe to the journal Nanoindustry to read the full article.
Readers feedback
