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Received: 13.03.2026 | Accepted: 17.03.2026 | DOI: https://doi.org/10.22184/1993-8578.2026.19.2.144.152
Original paper
OXIDE THIN FILMS FOR LASER MIRRORS
S.V.Sidorova1, Cand. of Sci. (Tech), Docent, ORCID: 0000-0002-3002-1246 / sidorova@bmstu.ru
D.S.Trekushevskiy1, Student, ORCID: 0009-0001-9728-9183
A.D.Kouptsov1, Post Graduate, ORCID: 0009-0002-3997-9722
Abstract. The results of a review of information sources on the subject of laser mirrors are presented. The data on the materials of the Bregg mirrors are generalized and structured. The characteristics of the L- and H-layers are given. The choice of materials for creating a laser mirror on a multilayer oxide film is justified. The results of testing the deposition modes of nanoscale thin-film layers of silicon oxide and titanium oxide are presented. The modes are described and the results of a study of the thicknesses of silicon oxide and aluminum oxide coatings are presented. The experimental data were processed using the method of a complete factorial experiment. Regression equations describing the dependence of oxide layer thicknesses on magnetron sputtering modes are obtained. A multilayer structure consisting of alternating layers of silicon oxide and titanium oxide is shown.
Keywords: laser mirror, Bregg mirror, silicon oxide, titanium oxide, quartz glass, magnetron sputtering, regression equation
For citation: S.V.Sidorova, D.S. Trekushevskiy, A.D. Kouptsov. Oxide thin films for laser mirrors. NANOINDUSTRY. 2026. Vol. 19. No. 2. PP. 144–152. https://doi.org/10.22184/1993-8578.2026.19.2.144.152.
Original paper
OXIDE THIN FILMS FOR LASER MIRRORS
S.V.Sidorova1, Cand. of Sci. (Tech), Docent, ORCID: 0000-0002-3002-1246 / sidorova@bmstu.ru
D.S.Trekushevskiy1, Student, ORCID: 0009-0001-9728-9183
A.D.Kouptsov1, Post Graduate, ORCID: 0009-0002-3997-9722
Abstract. The results of a review of information sources on the subject of laser mirrors are presented. The data on the materials of the Bregg mirrors are generalized and structured. The characteristics of the L- and H-layers are given. The choice of materials for creating a laser mirror on a multilayer oxide film is justified. The results of testing the deposition modes of nanoscale thin-film layers of silicon oxide and titanium oxide are presented. The modes are described and the results of a study of the thicknesses of silicon oxide and aluminum oxide coatings are presented. The experimental data were processed using the method of a complete factorial experiment. Regression equations describing the dependence of oxide layer thicknesses on magnetron sputtering modes are obtained. A multilayer structure consisting of alternating layers of silicon oxide and titanium oxide is shown.
Keywords: laser mirror, Bregg mirror, silicon oxide, titanium oxide, quartz glass, magnetron sputtering, regression equation
For citation: S.V.Sidorova, D.S. Trekushevskiy, A.D. Kouptsov. Oxide thin films for laser mirrors. NANOINDUSTRY. 2026. Vol. 19. No. 2. PP. 144–152. https://doi.org/10.22184/1993-8578.2026.19.2.144.152.
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