The developments in the millimeter wavelengths and the terahertz frequency range, as well as the need to ensure high values of the most important quality factor of wireless communication systems, radar and radio electronic countermeasures – product of output power, operating frequency and frequency band – have become a stimulus for the development of vacuum microelectronics. The use of basic and modified processes of micro- and nanotechnology and of infrastructure of integrated production of solid-state electronics and microsystem equipment create prerequisites for the evolution of vacuum electronics into the micro- and nanoscale region. The paper notes that in terms of a complex of parameters, including speed, quality factor, limiting operating frequency, noise level, resistance to radiation, temperature and electromagnetic influences, vacuum electronics devices can exceed solid-state functional analogues. The actual physical and technological problems of vacuum microelectronics are determined. At the Department of Radio Electronics and at the Center for Microtechnology and Diagnostics of ETU "LETI", modern developments are being realized, including field emission cathodes based on silicon carbide and diamond, a millimeter range traveling-wave tube for 5G wireless communication systems and millimeter-wave klystrons. Also, the paper considers areas in which vacuum microelectronics may be in demand.


Разработка: студия Green Art