Physical and chemical properties of carbon and fluorocarbon coatings obtained by pecvd at atmospheric pressure in a dynamic deposition mode
This article demonstrates a possibility of carbon and fluorocarbon coatings formation in a continuous (dynamic) mode of PECVD at atmospheric pressure using a low-frequency plasmatron of low-temperature plasma. The contact angle of wetting of the obtained coatings was established and the study was carried out using AFM.
Tags: carbon and fluorocarbon coatings deposition from gas phase осаждение из газовой фазы углеродные и фторуглеродные покрытия
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