The technology of silicon deposition has been developed, and it has been possible to obtain a durable polycrystalline silicon film with good adhesion on a PET substrate with a thickness of 150...200 nm. Using this technology, a prototype of a flexible variable capacitance was prepared. The study of capacitance changes due to changes in pressure acting on it has a linear form, which makes it possible to use this technology for the manufacture of a pressure sensor.

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Разработка: студия Green Art