Issue #2/2024
A.A.Terentyev, A.V.Smirnov
STUDY OF POSSIBILITY OF FLEXIBLE VARIABLE VESSELS FOR REMOTE PRESSURE MEASUREMENT SYSTEMS
STUDY OF POSSIBILITY OF FLEXIBLE VARIABLE VESSELS FOR REMOTE PRESSURE MEASUREMENT SYSTEMS
The technology of silicon deposition has been developed, and it has been possible to obtain a durable polycrystalline silicon film with good adhesion on a PET substrate with a thickness of 150...200 nm. Using this technology, a prototype of a flexible variable capacitance was prepared. The study of capacitance changes due to changes in pressure acting on it has a linear form, which makes it possible to use this technology for the manufacture of a pressure sensor.
Tags: давление кремний переменная емкость растровая микроскопия тонкопленочные системы
Subscribe to the journal Nanoindustry to read the full article.
Tags: давление кремний переменная емкость растровая микроскопия тонкопленочные системы
Subscribe to the journal Nanoindustry to read the full article.
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