On the basis of single crystal materials with inverse piezoelectric effect the displacement gauges of nano- and picometer ranges are developed, which can be used for calibration of scanning probe and electron microscopes. The displacement of the gauges was measured by optical interferometers based on the lasers with the Bragg and cesium cells frequency stabilization. The displacement gauges and interferometers can be used as manipulators and sensors in process equipment and measuring devices, as well in labs on nanomaterials, nanomechanics and nano-metrology.


Разработка: студия Green Art