The investigation of membrane element with thin-film nanostructured magnetostrictive layer in variable magnetic field
The vertical displacement of circular element based on TMRNS using MSA-500 microchip analyzer by optical method based on Doppler effect have been investigated. Firstly, we determined the natural frequency of a membrane under the 0,2 Pa acoustic pressure influence in the region of 0 Hz up to 5 kHz. Fig.2 presents a MSA-500 display screenshot of the ARF of the membrane under the acoustic influence of variable frequency. It was shown that the membrane natural frequency equals 3.5 kHz at 43 nm amplitude.
All further investigations of an influence of TMRNS element magnetostrictive properties on the membrane’s displacement were carried out under the variable magnetic field only. The MSA-500 analyzer was equipped with special attachment which is to provide variable magnetic fields in a central part of the membrane with intensity of 54 Oe and frequency of up to 10 kHz. To control the magnetic field in the location of the membrane the milliteslameter TP2-2U was used. The general view of MSA-500 analyzer with special attachment to control the magnetic field in the membrane’s area is presented in the Fig.3. Given the anisotropic properties of TMRNS, the membrane in the attachment was positioned so that the alternating magnetic field was orthogonal to the easy axis of magnetization. It was found that maximal amplitude of the membrane is observed at the values of magnetic field in a region of 0,9–1,2 mT (see Fig.4) at magnetic field frequencies of 500 Hz, 1,000 Hz and 2,000 Hz. Besides, it was shown that an amplitude of the membrane reaches 204 nm under the influence of magnetic field of 1 mT at frequency of 3,5 kHz (natural frequency of the membrane).
Thus, the research has shown that on the basis of the new combined technology it can be possible to develop the microsystems, where thin-film magnetostrictive nanostructure formed on thin ridged membrane or other element with corresponding properties can be used as an element of a microdrive. In order to obtain the high effectiveness of magnetostrictive materials applications on the surfaces of elastic elements the additional experimental researches focused on optimal balance of their thickness are strongly required.
The research was accomplished with financial support of The Ministry of Education and Science of the Russian Federation in the frame of project No. 8.8624.2017 for 2018 year.
Investigation of the developed membrane parameters was carried out with the aid of the instrumentation of SRF "Functional control and diagnostics of micro and nanosystem technique" (Shared Core Facilities) on a base of SDC "Technological Center" (Scientific Technological Center) . ■